CONNECTION STRUCTURE OF REMOTE SPECTROMETER

摘要

Provided is a connection structure of a remote spectrometer. The connection structure of a remote spectrometer can connect an EPD controller to the remote spectrometer as a USB interface installed in a chamber through a USB server to overcome a limitation due to the effective length of a USB cable and stably transmit data generated from the spectrometer to the EPD controller, thereby increasing monitoring efficiency of plasma emission emitted from a process chamber.