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经营范围
发明名称
COLLOIDAL SILICA BASED CHEMICAL MECHANICAL POLISHING SLURRY
摘要
申请公布号
EP1836268(A4)
申请公布日期
2009.12.23
申请号
EP20050756170
申请日期
2005.05.31
申请人
PLANAR SOLUTIONS LLC
发明人
MOYAERTS, GERT, R., M.;DELBRIDGE, KEN, A.;KOONTZ, NICOLE, R.;MOHSENI, SAEED, H.;SAYLES, GEROME, J.;MAHULIKAR, DEEPAK
分类号
C09G1/02
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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