发明名称 Composite metal films and carbon nanotube fabrication
摘要 Embodiments of the present invention provide methods for the fabrication of carbon nanotubes using composite metal films. A composite metal film is fabricated to provide uniform catalytic sites to facilitate the uniform growth of carbon nanotubes. Further embodiments provide embedded nanoparticles for carbon nanotube fabrication. Embodiments of the invention are capable of maintaining the integrity of the catalytic sites at temperatures used in carbon nanotube fabrication processes, 600 to 1100° C.
申请公布号 US7635503(B2) 申请公布日期 2009.12.22
申请号 US20060359165 申请日期 2006.02.21
申请人 INTEL CORPORATION 发明人 DOMINGUEZ JUAN E.;DUBIN VALERY M.;GSTREIN FLORIAN;GOLDSTEIN MICHAEL
分类号 C23C16/00 主分类号 C23C16/00
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