发明名称 Integrated circuit support structures and their fabrication
摘要 A method of fabricating an electronic substrate comprising the steps of; (A) selecting a first base layer; (B) depositing a first etchant resistant barrier layer onto the first base layer; (C) building up a first half stack of alternating conductive layers and insulating layers, the conductive layers being interconnected by vias through the insulating layers; (D) applying a second base layer onto the first half stack; (F) applying a protective coating of photoresist to the second base layer; (F) etching away the first base layer; (G) removing the protective coating of photoresist; (H) removing the first etchant resistant barrier layer; (I) building up a second half stack of alternating conductive layers and insulating layers, the conductive layers being interconnected by vias through the insulating layers, wherein the second half stack has a substantially symmetrical lay up to the first half stack; (J) applying an insulating layer onto the second hall stack of alternating conductive layers and insulating layers, (K) removing the second base layer, and (L) terminating the substrate by exposing ends of vias on outer surfaces of the stack and applying terminations thereto.
申请公布号 US7635641(B2) 申请公布日期 2009.12.22
申请号 US20050250421 申请日期 2005.10.17
申请人 AMITEC-ADVANCED MULTILAYER INTERCONNECT TECHNOLOGIES LTD. 发明人 HURWITZ DROR;FARKASH MARDECHAY;IGNER EVA;ZEIDLER AMIT;STATNIKOV BORIS;MICHAELI BENNY
分类号 H01L21/44 主分类号 H01L21/44
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