A HIGH VOLTAGE POWER SUPPLY FOR AN ION IMPLANTER

摘要

PURPOSE: A high voltage power supply for an ion implanter is provided to reduce an installation space by combining a plurality of small high voltage module with a power supply unit for supplying power to a high voltage terminal. CONSTITUTION: In a device, a high voltage terminal(100) is accommodated into an ion-implanter module. A power supply unit(200) supplies operation power to the ion-implanter module comprised of an insulated rod(220) and a generator(320). A plurality of small high voltage power source module(300) supplies a high voltage for the acceleration of the ion beam in the high voltage terminal. A gear-box is connected to the insulating rod and is operated by rotation of the insulating rod. The generator is connected to the gear-box and is operated by the operation of gear-box. The high voltage power source is connected to the generator.