| 摘要 |
<p>PURPOSE: A multi-layered thin film coating apparatus is provided to form desired surface property by forming a multilayered thin film on the surface of a product. CONSTITUTION: A multi-layered thin film coating apparatus comprises a vacuum container(10), a rotary jig(40), a plurality of cathodes, different targets, a gas pipe(61,71,81), an ion gun, and an electric thermal heat evaporation unit, an arc evaporation unit and an electric heater. The rotating jig is formed inside the vacuum container and a product(30) is mounted on the rotating jig and the rotating jig is connected to a bias power. A plurality of cathodes are installed inside the vacuum container. The different targets are mounted on the cathodes. The gas pipe is installed at the side of the target and supplies the reactive gas. The ion gun is installed inside the vacuum container. The electric heat evaporation unit is positioned on the center inside the rotating jig. The arc evaporation unit and the electronic heater are installed inside the vacuum container.</p> |
