| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas clarification method and apparatus which are inexpensive and allow the apparatus to be easily made compact and can selectively remove silanols. <P>SOLUTION: The gas clarification apparatus is used in the gas clarification method for collecting and removing silanols from atmospheric gas in a clean room, which is supplied to an exposure device of a semiconductor exposure process, and the gas clarification apparatus includes: a reaction collection part 1 filled with a fibrous inorganic compound 3 having a hydroxy group on a surface thereof brought into contact with the atmospheric gas; a heating means 2 for heating the fibrous inorganic compound 3; a temperature detection means 5 for detecting the temperature; and a temperature control part 4 which controls the heating means 2 on the basis of a signal from the temperature detection means 5 to control a surface temperature of the fibrous inorganic compound 3 to 70 to 300°C. Preferably, the fibrous inorganic compound 3 comprises one or more kinds of materials made of glass, quartz, silica, alumina, or silicon and the surface hydroxy group is activated by fire polishing or acid treatment. <P>COPYRIGHT: (C)2010,JPO&INPIT |
