| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet delivering head can improve the amount of displacement. SOLUTION: A piezoelectric body film (17) for a liquid droplet delivering head is arranged approximately at the central part of a first direction of a cavity (Ca), and the width (Wp1) in the first direction of the piezoelectric film is smaller than the width (Wc1) in the first direction of the cavity. There exists a first region (arm part 20) which is a cavity forming region and is not a forming region of the piezoelectric film on both sides in the first direction of the piezoelectric film. A lower electrode (15) includes an opening part (OA1) arranged in the first region and a bridge part (BA) alternately arranged with the opening part. By such a constitution as this, a constitution in which the forming region of the piezoelectric film and the cavity forming region do not overlap each other with the lower electrode in the first region extracted, can be obtained to be able to improve the amount of displacement. COPYRIGHT: (C)2010,JPO&INPIT
|
