| 摘要 |
The present invention relates to a magnetic sensor with which magnetic characteristics are made extremely stable by consideration of an area of contact of a base layer of a magnetic substance and a semiconductor substrate. On a semiconductor substrate a plurality of Hall elements are embedded so as to be coplanar to a top surface of the semiconductor substrate while being mutually spaced apart by a predetermined distance, and above the Hall elements and the semiconductor substrate, a base layer, having a coefficient of thermal expansion differing from that of the Hall elements and partially covers a region of each Hall element, is formed via a protective layer, and a magnetic flux concentrator, having an area larger than the base layer and with magnetic amplification, is formed on the base layer.
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