| 摘要 |
PROBLEM TO BE SOLVED: To perform an accurate examination by enabling a chuck defect to be detected. SOLUTION: A power source unit 13 is configured by connecting in series a resistor 13b and a DC power source 13c between an anode output terminal 13d and a cathode output terminal 13e. A DC voltage V from the DC power source 13c is applied between an anode terminal 3 and a cathode terminal 4 of an electrolytic capacitor 1 from the power source unit 13. A waveform A between a case 5 of the electrolytic capacitor 1 and the anode output terminal 13d is measured from the application start of the DC voltage V and a determination area B is compared with the waveform A. If the overall waveform A is included in the determination area B, a non-short-circuited state is discriminated with the anode terminal 3 and the case 5 not short-circuited. If the waveform A is not partially included in the determination area B, either a short-circuited state with the anode terminal 3 and the case 5 short-circuited or a non-connected state with the cathode output terminal 13e and the cathode terminal 4 not connected is discriminated or a non-connected state is discriminated with the anode output terminal 13d and the anode terminal 3 not connected. COPYRIGHT: (C)2010,JPO&INPIT
|
