| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for laminating workpieces by which a pair of planar workpieces can be laminated to each other in parallel with high accuracy while eliminating the entry of air, and the yield of products can be enhanced. Ž<P>SOLUTION: A table 4 for supporting a workpiece holder 8, and a lamination diaphragm 5 are provided inside a vacuum chamber 2. The workpiece holder 8 includes a lamination base 22 and a workpiece holding structure 23 to support first and second workpieces W1, W2, respectively, while leaving a predetermined gap therebetween. The lamination diaphragm 5 includes a diaphragm membrane 14 made of metal that can expand and deform into a convex arc toward the lamination base 22, and a pressure chamber 15. While air in the vacuum chamber 2 is evacuated by a vacuum source 3 and a working fluid is supplied to the pressure chamber 15 to expand and deform the diaphragm membrane 14, the table 4 is driven to laminate the second workpiece W2 to the first workpiece W1 from the center portion to the peripheral portion. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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