发明名称 WAFER POLISHING METHOD AND WAFER PRODUCED THEREBY
摘要 A wafer is polished by a method comprising a slicing step of cutting out a wafer from a single crystal ingot and a step of polishing at least one of both surfaces and an end face of the wafer, wherein the at least one surface and end face of the wafer are simultaneously subjected to a mirror polishing.
申请公布号 US2009311522(A1) 申请公布日期 2009.12.17
申请号 US20090481722 申请日期 2009.06.10
申请人 SUMCO CORPORATION 发明人 SATO HIROAKI
分类号 B32B5/16;B24B1/00;B24B9/00;B24B37/10;B24B37/20;H01L21/304 主分类号 B32B5/16
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