PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

摘要

Provided is a coaxial cable distributor containing coaxial cables which extend out of but not perpendicular to a branching member. A plasma processing apparatus (10) in which a gas is excited by microwaves to plasma process an object to be processed comprises a processing vessel (100), a microwave source (900) which outputs microwaves, a transmission line (900a) which transmits the microwaves output from the microwave source (900), a plurality of dielectric plates (305) which are provided on the inner wall of the processing vessel (100) and emit microwaves into the interior of the processing vessel, a plurality of first coaxial cables (610) which are adjacent to the plurality of dielectric plates (305) and transmit microwaves to the plurality of dielectric plates (305), and one stage or two or more stages of coaxial cable distributors (700) which distribute and transmit the microwaves transmitted by the transmission line (900a) to the plurality of first coaxial cables (610). The coaxial cable distributor (700) comprises a second coaxial cable (620) having an input member (In) and three or more third coaxial cables (630) which are connected to the second coaxial cable (620). Each of the third coaxial cables (630) extends out of but not perpendicular to the second coaxial cable (620).