| 摘要 |
PURPOSE: A plasma source is provided to improve the process uniformity by forming the symmetric of the pretest field and induced magnetic field. CONSTITUTION: The core(310) has rod-shape. Herbs(321,322,323) are spirally expended from the end part of core of horizontal as the regular length. Main coils(331,332,333) are spirally expended from the end part of herb of the respective horizontal the series. The horizontal extension length of the main coil is related to the number of rotation of the main coil. The number of structure of herb, the horizontal extension length of the main coil, and herb and main coil makes an important influence on the induction magnetic field and induction magnetic field. The imaginary diameter continuing the end part of the herbs and number of herbs of circle decides the electrical impedance and electromagnetic characteristic.
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