| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic sheet which can properly improve soft magnetic properties compared to prior ones, in particular, in a magnetic sheet which uses a high resistance soft magnetic film (A-M-O). <P>SOLUTION: A Cr film 9 and a magnetic film 6 are stacked sequentially on a plastic sheet 5, wherein the magnetic film 6 includes A-M-O (where, element A denotes Fe or Co, or a mixture thereof, and element M denotes at least one out of Hf, Ti, Zr, V, Nb, Ta, Mo, W, Al, Mg, Zn, Ca, Ce, Y and Si). The magnetic film 6 is formed of a film structure including an amorphous phase containing a compound of elements M and O and a microcrystalline phase having an average crystalline grain size of 30 nm or smaller and mainly including one or two kinds selected out of Fe or Co interspersed in the amorphous phase. <P>COPYRIGHT: (C)2010,JPO&INPIT |
