| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a fine piezoelectric colonnade structure, in the method a fine columnar body of a piezoelectric single crystal or a piezoelectric ceramic with an optional shape and a high aspect ratio is optionally arranged. <P>SOLUTION: A ceramic mold 1 made of a lamella-form machinable ceramic having a plurality of through-holes for forming a fine columnar piezoelectric colonnade is prepared. To one side of the ceramic mold, a seed single crystal substrate 2 is bonded; then, the ceramic mold is filled with a piezoelectric ceramic precursor 3; and the piezoelectric ceramic precursor filled into the ceramic mold is fired to form a fine piezoelectric ceramic structure 4 having a colonnade structure having a plurality of fine columns arranged therein. Then, the fine piezoelectric ceramic structure is single-crystallized by thermal treatment, giving the fine piezoelectric colonnade structure 5. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
