| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an interferometer which reduces the influence of optical artifacts such as dust, flaw and hole on lens surface, bubble in lens or the like which may affect interference fringe, without generating a loss in optical quantity, and no need of adding optical element. Ž<P>SOLUTION: In the interferometer which has a telecentric optical system 301, it is characterized by having a rotating mechanism 60 that a center axis 51 of a group of at least two lenses 205, 206 constituting the telecentric optical system 301 rotates around an optical axis 50 at the different position from the optical axis 50 of the interferometer. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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