ALUMINUM OXIDE PARTICLE AND POLISHING COMPOSITION CONTAINING THE SAME

摘要

Disclosed are aluminum oxide particles wherein primary particles have a hexahedral shape and an aspect ratio of 1-5.  The average primary particle diameter of the aluminum oxide particles is preferably 0.01-0.6 µm.  The a-particle ratio in the aluminum oxide particles is preferably 5-70%.  The average secondary particle diameter of the aluminum oxide particles is preferably 0.01-2 µm, and the value obtained by dividing the 90% particle diameter of the aluminum oxide particles by the 10% particle diameter is preferably 3 or less.  The aluminum oxide particles are used as abrasive grains for polishing semiconductor device substrates, hard disk substrates or display substrates.