发明名称 Method for manufacturing micromechanical or electronic component, involves attaching substrate material and covering material with each other and relatively positioning to each other by molding tool
摘要 <p>The method involves attaching a substrate material (11) and a covering material (12) with each other and relatively positioning to each other by a molding tool (15). A connection is made between the substrate material and the covering material on a wafer layer. The covering material is arranged in recesses (102) in the molding tool. An independent claim is included for a micromechanical or electronic component with a substrate material.</p>
申请公布号 DE102008002324(A1) 申请公布日期 2009.12.17
申请号 DE20081002324 申请日期 2008.06.10
申请人 ROBERT BOSCH GMBH 发明人 PIRK, TJALF;KNIES, SONJA
分类号 B81C1/00;B81B7/02;H01L21/52 主分类号 B81C1/00
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