发明名称 |
Method for manufacturing micromechanical or electronic component, involves attaching substrate material and covering material with each other and relatively positioning to each other by molding tool |
摘要 |
<p>The method involves attaching a substrate material (11) and a covering material (12) with each other and relatively positioning to each other by a molding tool (15). A connection is made between the substrate material and the covering material on a wafer layer. The covering material is arranged in recesses (102) in the molding tool. An independent claim is included for a micromechanical or electronic component with a substrate material.</p> |
申请公布号 |
DE102008002324(A1) |
申请公布日期 |
2009.12.17 |
申请号 |
DE20081002324 |
申请日期 |
2008.06.10 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
PIRK, TJALF;KNIES, SONJA |
分类号 |
B81C1/00;B81B7/02;H01L21/52 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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