发明名称 Method for producing a semiconductor component
摘要 Presented is a method for producing an optoelectronic component. The method includes separating a semiconductor layer based on a III-V-compound semiconductor material from a substrate by irradiation with a laser beam having a plateau-like spatial beam profile, where individual regions of the semiconductor layer are irradiated successively.
申请公布号 US2009311847(A1) 申请公布日期 2009.12.17
申请号 US20090583500 申请日期 2009.08.21
申请人 FEHRER MICHAEL;HAHN BERTHOLD;HARLE VOLKER;KAISER STEPHAN;OTTE FRANK;PLOSSL ANDREAS 发明人 FEHRER MICHAEL;HAHN BERTHOLD;HARLE VOLKER;KAISER STEPHAN;OTTE FRANK;PLOSSL ANDREAS
分类号 B23K26/00;H01L21/26;B23K26/40;B23K101/40;C30B33/00;H01L21/20;H01L21/268;H01L21/762;H01L33/00;H01S5/323 主分类号 B23K26/00
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