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发明名称
Bedampfungseinrichtung, Bedampfungsverfahren sowie Herstellverfahren für die Bedampfungseinrichtung
摘要
申请公布号
DE112008000313(T5)
申请公布日期
2009.12.17
申请号
DE200811000313T
申请日期
2008.01.30
申请人
TOKYO ELECTRON LTD.
发明人
SUDOU, KENJI
分类号
C23C14/24;H01L51/50;H05B33/10
主分类号
C23C14/24
代理机构
代理人
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地址
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