| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chemical filter that can effectively adsorb/remove pollutants contained even in low-humidity air, and a clean room equipped with the same. <P>SOLUTION: The chemical filter 6 comprising an adsorbent 21 that adsorbs and removes pollutants contained in air passing therethrough and supplies air 27 cleaned with the adsorbent 21 includes, as the adsorbent 21, a processed object of protection prepared by processing an object of protection which is manufactured or used in ambient air whereinto the cleaned air 27 is supplied and is adversely affected by adsorbing the pollutants, and a cooling device 22 for cooling the adsorbent 21 and/or air 28 to be supplied to the adsorbent 21. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
