| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent overshoot of the output flow rate of a flow controller when changing the output flow rate or changing the type of flowing gas. <P>SOLUTION: The automatic pressure regulator 20 of a gas supply pressure supplied to a flow controller includes a piezoelectrically driven pressure regulating valve 15, a control pressure detector 14 disposed on the output side of the pressure regulating valve 15, and a controller 16 for capturing a value P<SB>2</SB>detected by the control pressure detector 14 and a set point Pst of control pressure and feeding a control signal by a proportional control method to a piezoelectric drive part of the pressure regulating valve 15 to regulate the valve travel. An integral action is disabled to make the proportional control system by the controller cause a residual deviation in a control pressure. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
