| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a focus position adjustment device that has no limitation in a beam diameter and a laser beam machining apparatus. <P>SOLUTION: The focus position adjustment device 31 includes a concave lens 64 which enlarges the beam diameter of the laser light 45 introduced from outside and transmits it into a condensing lens 34, linearly moves the concave lens 64 along an optical axis of the concave lens 64 and adjusts the focus position of the laser light 45 by changing a distance between the concave lens 64 and the condensing lens 34. The concave lens 64 is held in a lens holder 65 and the lens holder 65 is attached to a movable segment 62 of a linear motion mechanism 51 prepared on a base body 50. The lens holder 65 is made in an almost equivalent thickness to the concave lens 64 and attached to the movable segment 62 in a state projecting from the base body 50. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
