| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of contamination due to occurrence of abrasion by laser light protruding from a workpiece when the workpiece mounted on a stage is annealed with laser light. SOLUTION: The stage has a stage body 2 for mounting a workpiece (substrate 30), and an irregular reflection surface 3a composed of ground glass of which at least the surface is rugged is formed over the whole periphery of the outside of a peripheral edge of a stage surface 2a of the stage body 2. The stage body 2a and the outer peripheral part 3 having the irregular reflection surface 3a can be composed of integrated quartz glass, the stage surface is made a smooth surface and the outer peripheral part is made the ground glass. Even when the outside of a substrate range is irradiated with laser light, the intensity of the laser light is weakened by the irregular reflection surface and the occurrence of contamination due to abrasion can be prevented. COPYRIGHT: (C)2010,JPO&INPIT |
