| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a foreign matter inspection device and a foreign matter inspection method capable of detecting foreign matter with appropriate sensitivity. Ž<P>SOLUTION: The foreign matter inspection device includes: a foreign matter detection section for detecting foreign matter on a photomask with prescribed sensitivity; a detection sensitivity information acquisition section for acquiring detection sensitivity information according to usage conditions of an aligner; and a sensitivity change section for changing the sensitivity of the foreign matter detection section, based on the detection sensitivity information. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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