| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which facilitates discrimination of whether cause of failure lies in an oscillation part for oscillating a laser beam or in the optical component of an irradiation part for irradiating a workpiece with an oscillated laser beam, without making the apparatus structure complicated, and a laser beam machining method. <P>SOLUTION: The laser beam machining apparatus which comprises a holding means 2 for holding a workpiece 10, an oscillation part having an oscillator 31 for oscillating a laser beam 6, and an irradiation part for irradiating the machining point 10a of a workpiece 10 with the oscillated laser beam 6, is provided with a first detecting means 4 for detecting the output of the laser beam 6 at the machining point 10a and a second detecting means 5 for detecting the output of the laser beam oscillated from the oscillator at a position between the oscillation part and the irradiation part. When the first detecting means 4 detects that the output of the laser beam 6 is deviated from a prescribed range, the second detecting means 5 detects the output of the laser beam 6 between the oscillation part and the irradiation part. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
