| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic bearing device suitably mountable on a device requiring high rigidity in a whole frequency area like an inner surface grinding machine, by increasing load capacity of a radial magnetic bearing, without deteriorating noise resistance of a sensor. Ž<P>SOLUTION: An outer diameter of bearing target parts 22 and 23 is formed larger than an outer diameter of sensor target parts 24 and 25, and yield strength of a construction material of the bearing target parts 22 and 23 is formed larger than yield strength of the sensor target parts 24 and 25. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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