发明名称 METHOD OF MANUFACTURING MEMBER HAVING GROOVE STRUCTURE OR HOLLOW STRUCTURE
摘要 PROBLEM TO BE SOLVED: To easily manufacture a member, in particular, a minute member having a groove structure or a hollow structure at a low cost. SOLUTION: On a substrate having a patterned curable resin composition, another curable resin composition having composition different from the first curable resin is applied to form a pattern. Thereafter, the second curable resin composition pattern is released by removing the curable resin composition which is formed first, with a solvent. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009295797(A) 申请公布日期 2009.12.17
申请号 JP20080148079 申请日期 2008.06.05
申请人 KYOWA HAKKO CHEMICAL CO LTD 发明人 HOTTA IWAO;KOMAI MASATSUGU;MORIYAMA SATOSHI
分类号 H01L21/027;B81C99/00;G03F7/40 主分类号 H01L21/027
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