FEEDING/RECOVERING MEANS FOR VAPOR DEPOSITION MATERIAL, AND VACUUM DEVICE

摘要

<P>PROBLEM TO BE SOLVED: To stabilize the operations for feeding and recovering a vapor deposition material in a vacuum deposition device. Ž<P>SOLUTION: The vacuum device includes: a vacuum tank; an evaporation source for heating and evaporating the vapor deposition material; vessels for storing the vapor deposition material; a container for loading and housing a plurality of vessels; and a transfer means for moving the vessels between the container and the evaporation source. The container is composed of a framework comprising at least a rod. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž