Depositing gradient layer on plastics substrate, e.g. scratch-resistant layer on lens, uses magnetron plasma enhanced chemical vapor deposition to give increasing organic compound content

摘要

In the stationary deposition of a gradient layer on a plastics substrate by plasma enhanced chemical vapor deposition (PECVD), where organometallic precursor(s) and reactive gas(es) are supplied into a chamber (11), (a) the plasma (17) is generated using a pulse-operated magnetron (16) and (b) the electricity supply parameters for the magnetron and the gas flow quantities into the vacuum chamber are not varied during layer deposition. An independent claim is included for a plastics substrate having a gradient layer containing at least carbon, oxygen, hydrogen and a metallic or semimetallic element, where the gradient layer contains organic and inorganic compounds and the ratio of organic to inorganic compounds increases from the substrate to the layer surface.