发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device which is improved in a breakdown voltage to a dielectric breakdown of an insulating film formed on a semiconductor layer without increasing the thickness of the insulating film, and a method of manufacturing the same. Ž<P>SOLUTION: A LOCOS oxide film 8 is formed on the surface of an epitaxial layer 5. Further, a first insulator 13 which is thicker than the LOCOS oxide film 8 is buried in the epitaxial layer 5. Then a resistance element 3 is formed on the first insulator 13. Consequently, the first insulator 13 is interposed between the resistance element 3 and epitaxial layer 5. A voltage applied between the epitaxial layer 5 and resistance element 3 is dispersed to the first insulator 13, so an application voltage applied to the LOCOS oxide film 8 due to application of a voltage to the resistance element 3 can be reduced. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009295783(A) 申请公布日期 2009.12.17
申请号 JP20080147872 申请日期 2008.06.05
申请人 ROHM CO LTD 发明人 IZUMI NAOKI
分类号 H01L21/8234;H01L21/822;H01L27/04;H01L27/06 主分类号 H01L21/8234
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