| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lapping apparatus having an abrasive particle embedding means for efficiently embedding abrasive particles in a surface plate forming a polishing face. <P>SOLUTION: The abrasive particle embedding means 6 includes an abrasive particle embedding mechanism 60 consisting of a thrust member 61 having a circular thrust face opposite to the surface of the surface plate and a mounting face on the opposite side to the thrust face, a supporting member 62 having a supporting portion on which the mounting face of the thrust member is mounted and a supporting shaft portion erected from the supporting portion, an ultrasonic vibrator 65 arranged on the supporting shaft portion of the supporting member 62, and a spindle member arranged on the supporting member 62, and an AC power supply means for applying AC power to the ultrasonic vibrator 65 of the abrasive particle embedding mechanism 60 to generate ultrasonic vibration. The thrust member 61 is formed so that its whole circular thrust face contacts the surface of the surface plate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
