METHOD OF INITIATING MICROWAVE PLASMA AND SYSTEM FOR SELECTIVELY DECOMPOSING CHEMICAL MOLECULE USING THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method of initiating a plasma processing system for treating a fluid mixture such as a gas mixture with plasma.

SOLUTION: The method includes a means for combining a microwave power source with a fluid mixture, especially a gas mixture which flows through an insulating tube 16 installed in the means for combining. The means for combining transfers part of microwave energy to the fluid mixture to generate plasma and thus can sever a chemical bond of the fluid molecule. Argon is injected into the tube at first, and high-voltage discharge is then generated by microwave output power sufficient for igniting the discharge using an electrode 23 located near the argon injection point, and subsequently the argon is gradually replaced with the fluid mixture to be treated so that the plasma discharge can be maintained.

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