| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic sheet capable of appropriately raising soft magnetic properties in comparison with the conventional one especially in the magnetic sheet using high resistance soft magnetic film (A-M-O) and the manufacturing method thereof. SOLUTION: In the magnetic sheet 4, on both sides of a resin sheet (substrate) 5, magnetic films 6, 6 composed of A-M-O (provided that an element A expresses Fe or Co or their mixture, and an element M expresses at least any one kind of Hf, Ti, Zr, V, Nb, Ta, Mo, W, Al, Mg, Zn, Ca) are deposited by a physical vapor deposition method, and film stress of the magnetic films 6 becomes 600 MPa or more in absolute values. COPYRIGHT: (C)2010,JPO&INPIT
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