| 发明名称 |
Device for holding disk-shaped objects |
| 摘要 |
A device for holding disk-shaped objects, particularly semiconductor wafers, having at least three contact elements for depositing and/or fixing the disk-shaped object at its outer edge area. The contact elements are designed such that they have an incline facing the object and a supporting surface.
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| 申请公布号 |
US2009309285(A1) |
申请公布日期 |
2009.12.17 |
| 申请号 |
US20090455634 |
申请日期 |
2009.06.04 |
| 申请人 |
VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH |
发明人 |
SCHENCK RENE;IFFLAND THOMAS;DEUTSCHER WINFRIED |
| 分类号 |
B23Q3/00 |
主分类号 |
B23Q3/00 |
| 代理机构 |
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