| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing system for rotating a carrier surface plate via a roller while uniformizing a contacting condition between the roller and the peripheral surface of the carrier surface plate for efficient rotation transmission. <P>SOLUTION: The carrier surface plate 40 has a roller driving motor 115 for driving the roller 110 to be rotated, and a roller moving structure 150 for moving the roller in the radial direction. It is rotated by a plurality of roller drive units 100 arranged around the carrier surface plate 40. The polishing system comprises a radial position detecting part 160 for detecting the position of a surface plate outer peripheral surface 45 passing through an arrangement region of each roller drive unit 100 when the carrier surface plate 40 is rotated. A control device controls the moving position and the rotating speed of the roller 110 of each roller drive unit depending on the position of the outer peripheral surface 45 detected by the radial position detecting part 160. <P>COPYRIGHT: (C)2010,JPO&INPIT |
