APPARATUS AND METHOD FOR ADJUSTING TEMPERATURE, APPARATUS AND METHOD FOR SUPPLYING LIQUID, APPARATUS AND METHOD FOR EXPOSURE, AND METHOD FOR MANUFACTURING DEVICE
摘要
<P>PROBLEM TO BE SOLVED: To provide a temperature adjustment apparatus capable of adjusting liquid to a required temperature. <P>SOLUTION: The temperature adjustment apparatus includes: a movable member arranged in a first space and allowed to move to send liquid in the first space; a drive device arranged on the outside of the first space to move the movable member by generating electromagnetic force by current supply; and a control device for executing the temperature adjustment of the liquid in the first space by controlling the drive device. <P>COPYRIGHT: (C)2010,JPO&INPIT
