| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plotter which can process data so as not to generate a missing pattern. <P>SOLUTION: This plotter 100 comprises: a cell extracting frame deciding part 114 for using processing area boundary information defining a boundary of a plurality of processing areas which disperse layout data to decide a cell extracting frame in which a marginal width is attached to the processing area; a cell extracting part 116 for arranging a cell reference position in the other processing area frames while extracting a cell spreading over the cell extracting frame of the processing area concerned from among a plurality of cells for each cell extracting frame; a subfield dividing part 118 for distributing partial figures in the cells positioned in a plurality of SF areas so defined as to belong to any processing area of the extracted cells to the processing area concerned; a control computer unit 130 for dispersing data of the distributed partial figure for each processing area; and a plotting part 150 for plotting a pattern on a sample by using charged particle beams based on output data after the data processing. <P>COPYRIGHT: (C)2010,JPO&INPIT |
