ELEMENT TRANSFER DEVICE, ELEMENT TRANSFER METHOD, AND METHOD OF MANUFACTURING DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a structure which allows a transfer substrate and a temporary holding substrate to be quickly brought closer to each other with a desired gap without contacting when aligning transfer positions of elements in an element transfer step.

SOLUTION: An element transfer device includes: a first substrate-supporting part 11 supporting a transfer substrate 16; a second substrate-supporting part 12 supporting a temporary holding substrate 17 holding a plurality of elements 18 to be transferred to the transfer substrate; an elevation driving part 13 moving the temporary holding substrate 17 toward and away from the transfer substrate 16; and aligning means (14 and 15) aligning transfer positions of elements 18 in a state where both of substrates are brought closer to each other with a prescribed gap. The second substrate supporting part 12 includes: a substrate suction part 22 having a porous material 26 for sucking the temporary holding substrate 17; and a pressure means which applies a pressure to the substrate suction part 22 in such a direction that the temporary holding substrate 17 sucked to the substrate suction part is bent so as to be convex toward the transfer substrate 16.

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