发明名称 DRYING JIG, DRYER, DRYING SYSTEM, AND MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a drying jig making drying possible in stable quality by removing a water drop residue which is generated when performing warm water lifting drying and drying by lifting a dried substrate from an oil level called as Marangoni drying. SOLUTION: In this warm water lifting drying system after cleaning a substrate of a magnetic recording medium or a Marangoni drying system, a drying jig 1 supports contours of a plurality of sheets of dried substrates arranged in a vertical orientation and makes contact with the substrate small by making a support into a form of a sword point, and has an aperture attracting liquid drop in the support. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009295672(A) 申请公布日期 2009.12.17
申请号 JP20080145763 申请日期 2008.06.03
申请人 FUJI ELECTRIC DEVICE TECHNOLOGY CO LTD;SPEEDFAM CLEAN SYSTEM CO LTD 发明人 SHIMIZU TAKAHIRO;FUKUMURA MASATO
分类号 H01L21/683;G11B5/84;H01L21/673 主分类号 H01L21/683
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