发明名称 |
DRYING JIG, DRYER, DRYING SYSTEM, AND MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM |
摘要 |
PROBLEM TO BE SOLVED: To provide a drying jig making drying possible in stable quality by removing a water drop residue which is generated when performing warm water lifting drying and drying by lifting a dried substrate from an oil level called as Marangoni drying. SOLUTION: In this warm water lifting drying system after cleaning a substrate of a magnetic recording medium or a Marangoni drying system, a drying jig 1 supports contours of a plurality of sheets of dried substrates arranged in a vertical orientation and makes contact with the substrate small by making a support into a form of a sword point, and has an aperture attracting liquid drop in the support. COPYRIGHT: (C)2010,JPO&INPIT |
申请公布号 |
JP2009295672(A) |
申请公布日期 |
2009.12.17 |
申请号 |
JP20080145763 |
申请日期 |
2008.06.03 |
申请人 |
FUJI ELECTRIC DEVICE TECHNOLOGY CO LTD;SPEEDFAM CLEAN SYSTEM CO LTD |
发明人 |
SHIMIZU TAKAHIRO;FUKUMURA MASATO |
分类号 |
H01L21/683;G11B5/84;H01L21/673 |
主分类号 |
H01L21/683 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|