| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor apparatus that prevents diffusion of materials of a magnetic film during a process for manufacturing the semiconductor apparatus, and the method of manufacturing the same. SOLUTION: The semiconductor apparatus 1 includes: a substrate 20; a semiconductor device 12 formed on the principal surface of the substrate 20 and including an interconnect layer; a magnetic shielding film 15 of a magnetic material covering the semiconductor device 12; and a buffer film 14 disposed between the semiconductor device 12 and the magnetic shielding film 15, and preventing diffusion of the magnetic material of the magnetic shielding film 15. The buffer film 14 provides a diffusion prevention effect of the magnetic material and also has an effect of promoting crystallization of the magnetic shielding film. COPYRIGHT: (C)2010,JPO&INPIT |
