| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for producing thin films with easy operability, by which orientation of a thin film constituent material is improved and uniformity in film thickness of thin films and its controllability are also improved, and to provide a method for manufacturing an electronic device. SOLUTION: The method for producing thin films includes: a first step of preparing a dispersion 8 in which CNTs are dispersed by mixing CNTs and a surfactant; a second step of forming a dispersion film 21 comprising the dispersion 8 into a holding ring 25; a third step of transferring the dispersion 8 in film shape to surfaces of a substrate 17 by bringing the dispersion film 21 and the substrate 17 into relatively vertical slide reciprocation while being in contact with each other; and a fourth step of forming CNT thin films through drying of the dispersion 8 in film shape formed on the surfaces of the substrate 17. COPYRIGHT: (C)2010,JPO&INPIT |
