| 摘要 |
PROBLEM TO BE SOLVED: To provide a profile measuring apparatus capable of evaluating the output of laser light which is used under environment where high-density laser light irradiation is performed, and to provide a profile measuring method for laser light. SOLUTION: A first profile measuring apparatus 10-1 pertaining to this embodiment has a plurality of heat-absorbing substances 13 arranged in a line so as to receive laser light 12 emitted from a laser irradiation means 11, thermocouples (temperature measuring sections) 14 provided so as to touch these heat-absorbing substances 13 to measure the temperatures of the heat-absorbing substances 13, and a detection part 15 for detecting a heat input density distribution in the direction of arrangement of the heat-absorbing substances 13 on the basis of measurement results of these thermocouples 14. The heat input density distribution by the laser light 12 is evaluated from temperature-rise distribution of the heat-absorbing substances 13 heated with the laser light 12, and irradiation intensity distribution of the laser light 12 is measured. COPYRIGHT: (C)2010,JPO&INPIT
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