| 摘要 |
A driving agent vacuum pump configured as a micropump is presented. The vacuum pump includes an evaporation chamber and a pumping chamber, which are separated by a jet arrangement. The jet arrangement includes a planar arrangement of at least one jet running vertically in depth between two plates. The two plates cover the evaporation chamber and the pumping chamber about the jet arrangement. An opening is provided in the pumping chamber above the jet arrangement for taking in an agent to be pumped. A second opening is provided for driving out a compressed gas below the jet arrangement. A connection is provided between the evaporation chamber and the pumping chamber through which a condensed driving agent is returned.
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