| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inkjet recording head of high reliability contributing to formation of high image quality of a formed image. Ž<P>SOLUTION: This inkjet recording head has a silicon substrate 1 formed with an ink supply port (not shown in the figure). The inkjet recording head has a flow channel forming member 3 provided on a surface of the silicon substrate 1, and formed with a plurality of pressure chambers 8 arranged juxtaposedly, and a delivery port 7 communicating each pressure chamber 8 with an external space. The inkjet recording head has also a close contact layer 4 provided in the surface of the silicon substrate 1, and for holding one part of the flow channel forming member 3, and a delivery energy generating element 2 arranged opposed to each delivery port 7, and for delivering ink from the delivery port 7. Each pressure chamber 8 is communicated with the ink supply port, by a flow channel 6a or a flow channel 6b formed in the flow channel forming member 3 to surround respectively the surface of the silicon substrate 1. The close contact layer 4 is arranged ranging over from a portion of holding the flow channel forming member 3 to an area inside the flow channel 6a on the surface of the silicon substrate 1. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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