| 摘要 |
PROBLEM TO BE SOLVED: To prevent an increase in a condensed light diameter of illumination light resulting from an increase in a deflection speed through the use of an acoustic optical deflector. SOLUTION: The microscope apparatus 1 includes: the acoustic optical deflectors 4 and 5 for deflecting the illumination light L emitted from a light source 2; an incident beam shaping optical system 3 disposed at the front stage of the acoustic optical deflectors 4 and 5, for adjusting the luminous flux diameter of the illumination light L; an objective lens 8 for condensing the illumination light L deflected by the acoustic optical deflectors 4 and 5 to a sample A; a pupil projection optical system 7 disposed between the objective lens 8 and the acoustic optical deflectors 4 and 5, for adjusting the luminous flux diameter of the illumination light L to be made incident on the pupil position of the objective lens 8; and a control section 9 that controls the incident beam shaping optical system 3 and the pupil projection optical system 7 so that the luminous flux diameter of the illumination light L made incident on the acoustic optical deflectors 4 and 5 may become narrow and the pupil projection magnification may be increased when the deflection speed of the illumination light L by means of the acoustic optical deflectors 4 and 5 becomes higher. COPYRIGHT: (C)2010,JPO&INPIT |
