IONIC LIQUID MEDIUMS FOR HOLDING SOLID PHASE PROCESS GAS PRECURSORS
摘要
<p>Ionic fluid mixtures are described that include an ionic liquid and a solid-phase material. The ionic liquid and the solid-phase material are selected to convert the solid-phase material into a gas phase material at a temperature that is lower than a conversion of the ionic liquid into a gas phase ionic material. In addition, methods of supplying a gaseous precursor to an application are described. These methods include providing a mixture of an ionic liquid and a solid-phase starting material, heating the mixture to a temperature that vaporizes at least a portion of the solid-phase starting material into the gaseous precursor, and transporting the gaseous precursor from the mixture to the application that utilizes the gaseous precursor.</p>
申请公布号
WO2009152242(A1)
申请公布日期
2009.12.17
申请号
WO2009US46902
申请日期
2009.06.10
申请人
MATHESON TRI-GAS, INC.;TORRES, ROBERT;SCOTT, DANE, C.