发明名称 METHOD FOR FABRICATING DEVICE HAVING CHANNEL LAYER AND SENSOR DEVICE FABRICATED BY USING THE SAME
摘要 <p>PURPOSE: A method for manufacturing a device containing a channel membrane, and a sensor device prepared by using the method are provided to reduce the electrical noise, thereby improving the characteristics of a device. CONSTITUTION: A method for manufacturing a device containing a channel membrane comprises the steps of forming a channel film having the shape whose width increases in the region crossing with an electrode(35), on a substrate(30); and forming an electrode crossing with the channel film(34) on the resultant where a channel film is formed. The channel film has a line type of a certain width, wherein the width increases at the region where it crosses with an electrode.</p>
申请公布号 KR20090129965(A) 申请公布日期 2009.12.17
申请号 KR20090052411 申请日期 2009.06.12
申请人 SNU R&DB FOUNDATION;KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION 发明人 HONG, SEUNG HUN;LEE, HYOUNG WOO;NAMGUNG, SEON
分类号 B82B3/00;H01L21/027 主分类号 B82B3/00
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