发明名称 |
METHOD FOR FABRICATING DEVICE HAVING CHANNEL LAYER AND SENSOR DEVICE FABRICATED BY USING THE SAME |
摘要 |
<p>PURPOSE: A method for manufacturing a device containing a channel membrane, and a sensor device prepared by using the method are provided to reduce the electrical noise, thereby improving the characteristics of a device. CONSTITUTION: A method for manufacturing a device containing a channel membrane comprises the steps of forming a channel film having the shape whose width increases in the region crossing with an electrode(35), on a substrate(30); and forming an electrode crossing with the channel film(34) on the resultant where a channel film is formed. The channel film has a line type of a certain width, wherein the width increases at the region where it crosses with an electrode.</p> |
申请公布号 |
KR20090129965(A) |
申请公布日期 |
2009.12.17 |
申请号 |
KR20090052411 |
申请日期 |
2009.06.12 |
申请人 |
SNU R&DB FOUNDATION;KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION |
发明人 |
HONG, SEUNG HUN;LEE, HYOUNG WOO;NAMGUNG, SEON |
分类号 |
B82B3/00;H01L21/027 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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