发明名称 METHOD OF MANUFACTURING COLOR FILTER, METHOD OF MANUFACTURING SOLID-STATE IMAGING DEVICE, METHOD OF MANUFACTURING DISPLAY APPARATUS AND RINSE LIQUID
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a color filter by which occurrence of color mixing can be prevented and color reproducibility can be improved and further to provide a method of manufacturing a solid-state imaging device, a method of manufacturing a display apparatus and a rinse liquid. <P>SOLUTION: The method of manufacturing the color filter includes a developing processing step of developing an exposed photosensitive colored film and a surface treating step of carrying out surface treatment to the photosensitive colored film developed at the developing processing process by covering the film with the rinse liquid. In the surface treating process, an aqueous solution added with a nonionic surfactant is used as the rinse liquid. Further the method of manufacturing the solid-state imaging device, the method of manufacturing the display apparatus and the rinse liquid are provided. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009294448(A) 申请公布日期 2009.12.17
申请号 JP20080148177 申请日期 2008.06.05
申请人 SONY CORP 发明人 HARASAWA MASANORI
分类号 G02B5/20;G02F1/1335;G03F7/32;H01L27/14 主分类号 G02B5/20
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